Sensors and Actuators A Physical · 2004 · 32 citations · 7 references
EngineeringMechanical EngineeringPhysicsMicroelectromechanical SystemsSensorsForce SensingForce SensorsMechanical MeasurementMechanical SensorsSoft SensorsTactile SensingSoft Tactile SensorsTactile Force SensorsTactile Sensor DesignTactile SensorsThree-dimensional Measurement
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Silicon three-axial tactile sensor
P.M. Sarro, S. Middelhoek · Sensors and Actuators A Physical · 1996 · 147 citations
Engineering, Materials Engineering, Mechanical Engineering +11
An integrated MEMS three-dimensional tactile sensor with large force range
Tao Mei, Wen J. Li, Ge Yu et al. · Sensors and Actuators A Physical · 2000 · 136 citations