Sensors and Actuators A Physical · 2000 · 136 citations · 5 references
EngineeringMaterials ScienceMechanical EngineeringMicroelectromechanical SystemsMicroelectronicsSensorsForce SensingForce SensorsMechanical SensorsMems SensorsMicroelectromechanical SensorsTactile SensingMicroelectromechanical Force SensorsMicroscale Force MeasurementTactile Force SensorsTactile Sensor IntegrationTactile Sensors
5
A surface micromachined microtactile sensor array
Bonnie L. Gray, Ronald S. Fearing · 2002 · 182 citations
Silicon three-axial tactile sensor
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Engineering, Materials Engineering, Mechanical Engineering +11