20 GHz high performance planar Si/InGaAs <i>p-i-n</i> photodetector

B. F. Levine, Aaron R. Hawkins, S. Hiu, B. J. Tseng, C. A. King, L. A. Gruezke, Wayne Johnson, D. R. Zolnowski, John E. Bowers

Applied Physics Letters · 1997 · 24 citations · 8 references

Concepts

Abstract

Planar Si/InGaAs wafer fused p-i-n photodetectors were fabricated and measured. They show high internal quantum efficiency, high speed, record low dark current, and no evidence of charge trapping, recombination centers, or a bandgap discontinuity at the heterointerface.

References

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