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SOI nanophotonic waveguide structures fabricated with deep UV lithography

DOI

31

Citations

8

References

2004

Year

Wim Bogaerts, Pieter Dumon, Dirk Taillaert, Vincent Wiaux, S. Beckx, Bert Luyssaert, Jan Van Campenhout, Dries Van Thourhout, Roel Baets
Photonics and Nanostructures - Fundamentals and Applications

References

YearCitations

Nanophotonic waveguides in silicon-on-insulator fabricated with CMOS technology

Wim Bogaerts, R. Baets, Pieter Dumon,

Journal of Lightwave Technology

2005

850

An out-of-plane grating coupler for efficient butt-coupling between compact planar waveguides and single-mode fibers

Dirk Taillaert, Wim Bogaerts, Peter Bienstman,

IEEE Journal of Quantum Electronics

2002

611

Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography

Pieter Dumon, Wim Bogaerts, Vincent Wiaux,

IEEE Photonics Technology Letters

2004

426

Basic structures for photonic integrated circuits in Silicon-on-insulator

Wim Bogaerts, Dirk Taillaert, Bert Luyssaert,

Optics Express

2004

266

Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography

Wim Bogaerts, Vincent Wiaux, Dirk Taillaert,

IEEE Journal of Selected Topics in Quantum Electronics

2002

161

The Fabry Perot interferometer

M.C. Hutley

Infrared Physics

1990

102

Large-scale production techniques for photonic nanostructures

Wim Bogaerts, Vincent Wiaux, Pieter Dumon,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2003

25

Silicon-on-insulator nanophotonics

Wim Bogaerts, Pieter Dumon, Patrick Jaenen,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2005

16

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