Statistics
Publications
21
Citations
1.2K
H-Index
16
Active since
1998
Affiliations
Patrick Jaenen is an author at IMEC specializing in engineering, applied physics, and electrical engineering.
Publications per year
1998–2021
21
21
Pitch doubling through dual-patterning lithography challenges in integration and litho budgets
Mircea Dusa, John Quaedackers, Olaf F. A. Larsen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 87 citations
Wafer Scale Processing, Engineering, Electron-beam Lithography +13
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1–5 of 21