Statistics
Publications
22
Citations
807
H-Index
15
Active since
1997
Olaf F. A. Larsen is an author at Vrije Universiteit Amsterdam specializing in natural sciences, spectroscopy, and chemistry.
Publications per year
1997–2023
22
22
Pitch doubling through dual-patterning lithography challenges in integration and litho budgets
Mircea Dusa, John Quaedackers, Olaf F. A. Larsen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 89 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +13
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