Low-Loss SOI Photonic Wires and Ring Resonators Fabricated With Deep UV Lithography

Pieter Dumon, Wim Bogaerts, Vincent Wiaux, +8

IEEE Photonics Technology Letters

PhotonicsRing ResonatorsEngineeringCompact RacetrackApplied Physics +10

Compact Wavelength-Selective Functions in Silicon-on-Insulator Photonic Wires

Wim Bogaerts, Pieter Dumon, Dries Van Thourhout, +6

IEEE Journal of Selected Topics in Quantum Electronics

Photonic DevicePhotonicsCompact Wavelength-selective ElementsOptical InterconnectsEngineering +11

Fabrication of photonic crystals in silicon-on-insulator using 248-nm deep UV lithography

Wim Bogaerts, Vincent Wiaux, Dirk Taillaert, +4

IEEE Journal of Selected Topics in Quantum Electronics

EngineeringIntegrated PhotonicsIntegrated CircuitsMicro-optical ComponentSilicon On Insulator +18

Ultralow-loss 3-dB photonic crystal waveguide splitter

Lars H. Frandsen, P.I. Borel, Yanxin Zhuang, +9

Optics Letters

Highly manufacturable FinFETs with sub-10nm fin width and high aspect ratio fabricated with immersion lithography

M.J.H. van Dal, Nadine Collaert, G. Doornbos, +22

EngineeringIntegrated CircuitsInterconnect (Integrated Circuits)Semiconductor DeviceWafer Scale Processing +16

Linear and Nonlinear Nanophotonic Devices Based on Silicon-on-Insulator Wire Waveguides

Pieter Dumon, Gino Priem, L.R. Nunes, +9

Japanese Journal of Applied Physics

EngineeringNonlinear OpticsNonlinear PropertiesProgrammable PhotonicsOptical Properties +14

Evaluation of Megasonic Cleaning for Sub-90nm Technologies

Guy Vereecke, Frank Holsteyns, Sophia Arnauts, +8

Diffusion and defect data, solid state data. Part B, Solid state phenomena/Solid state phenomena

Materials ScienceChemical EngineeringEngineeringNanoscale ChemistryFragile Structures +13

SOI nanophotonic waveguide structures fabricated with deep UV lithography

Wim Bogaerts, Pieter Dumon, Dirk Taillaert, +6

Photonics and Nanostructures - Fundamentals and Applications

PhotonicsEngineeringApplied PhysicsDeep Uv LithographyPlanar Waveguide Sensor +5

Gatestacks for scalable high-performance FinFETs

G. Vellianitis, J. Pétry, Bartek Pawlak, +26

EngineeringVlsi DesignExcellent PerformanceComputer ArchitectureIntegrated Circuits +14

Diffusion of solvents in thin porous films

Denis Shamiryan, Mikhaı̈l R. Baklanov, P. B. Lyons, +3

Colloids and Surfaces A Physicochemical and Engineering Aspects

Thin Porous FilmsChemical EngineeringEngineeringDiffusion ResistanceSurface Science +3