Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization - Concepedia

Concepedia

Publication | Open Access

Direct fabrication of three-dimensional buried conductive channels in single crystal diamond with ion microbeam induced graphitization

DOI Full Paper Access

41

Citations

33

References

2008

Year

P. Olivero, Giampiero Amato, F. Bellotti, Oksana Budnyk, Elisabetta Colombo, M. Jakšić, C. Manfredotti, Željko Pastuović, Federico Picollo, N. Skukan,

Diamond and Related Materials

Materials ScienceDiamond-like CarbonIon ImplantationEngineeringIon MicrobeamMicrofabricationNanotechnologyDirect FabricationApplied PhysicsNano Electro Mechanical SystemSingle Crystal Diamond

References

	Year	Citations

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