High-precision capacitative absolute pressure sensor

Pressure sensitivity in anisotropically etched thin-diaphragm pressure sensors

Samuel Kelly Clark, K.D. Wise · IEEE Transactions on Electron Devices · 1979 · 299 citations

Engineering, Materials Engineering, Mechanical Engineering +17

Outgassing of Glass

B J Todd · Journal of Applied Physics · 1955 · 105 citations

Natural Sciences, Materials Engineering, Materials Science +14

A High-Resolution Capacitance-to-Frequency Converter

F. Krummenacher · IEEE Journal of Solid-State Circuits · 1985 · 55 citations

Engineering, Electrical Engineering, Analog Electronics +16

An integrated capacitive pressure sensor with frequency-modulated output

A. Hanneborg, Thor-Erik Hansen, Elmer V. Carlson et al. · Sensors and Actuators · 1986 · 52 citations

Engineering, Electrical Engineering, Instrumentation +13