Triplasmatron sources for broad and reactive ion beams

Theoretical and experimental study of the duoplasmatron ion source

C Lejeune · Nuclear Instruments and Methods · 1974 · 51 citations

Engineering, Physics, Duoplasmatron Ion Source +3

Plasma etching in a multipolar discharge

T. E. Wicker, T. D. Mantéi · Journal of Applied Physics · 1985 · 43 citations

Materials Science, Electrical Engineering, Plasma Electronics +14

Plasma etching in magnetic multipole microwave discharge

Y. Arnal, Jacques Pelletier, C. Pomot et al. · Applied Physics Letters · 1984 · 39 citations

Electrical Engineering, Plasma Electronics, Engineering +12

Chemically assisted ion beam etching of GaAs, Ti, and Mo

Jeff Chinn, A. Fernandez, I. Adesida et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1983 · 38 citations

Engineering, Electron-beam Lithography, Increased Chlorine Concentrations +16

Selective Reactive Ion Beam Etching of SiO2 over Polycrystalline Si

Barbara A. Heath · Journal of The Electrochemical Society · 1982 · 36 citations

Materials Engineering, Materials Science, Ion Implantation +13