Concepedia

J-P Gilles

JG

Statistics

Publications

3

Citations

58

H-Index

3

Active since

1986

Affiliations

Université Paris-Sud(Current)

Centre National de la Recherche Scientifique

J-P Gilles is an author at Université Paris-Sud specializing in physics, microfabrication, and image formation.

Top concepts

Publications per year

1986–1998

3

Publications

3

Fabrication of a gray-tone mask and pattern transfer in thick photoresists

Stéphane Nicolas, Elisabeth Dufour‐Gergam, Alain Bosseboeuf et al. · Journal of Micromechanics and Microengineering · 1998 · 28 citations

, , +18

Rf multipolar plasma for broad and reactive ion beams

C Lejeune, J.P. Grandchamp, O Kessi et al. · Vacuum · 1986 · 20 citations

, , +2

Triplasmatron sources for broad and reactive ion beams

C Lejeune, J.P. Grandchamp, O Kessi et al. · Vacuum · 1986 · 10 citations

, , +1

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