Preparation of Giant-Grain Seed Layer for Poly-Silicon Thin-Film Solar Cells

Abstract

A silicon thin-film with giant grains has been formed on a stacked substrate having a low melting point metallic layer and a low heat capacitance layer. Grains as large as 17 µm could be fabricated by application of a single shot of an excimer-laser light pulse with light intensity gradient to this structure. This technology seems attractive for the fabrication of giant-grain poly-Si thin-film solar cells.