Concepedia
Surface and Coatings Technology · 1993 · 47 citations · 3 references
Materials ScienceMaterials EngineeringHigh Rate DepositionAluminium NitrideEngineeringSurface ScienceApplied PhysicsReactive Gas FlowThin FilmsChemical DepositionAlumina FilmsChemical Vapor DepositionThin Film Processing
3
High-rate low kinetic energy gas-flow-sputtering system
Kiyoshi Ishii · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1989 · 90 citations
Miniaturization, Engineering, Vacuum Plasma Technology +16
Hollow cathode discharge sputtering device for uniform large area thin film deposition
H. Koch, L. J. Friedrich, V. Hinkel et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1991 · 44 citations
Engineering, Glow Discharge, Thin Film Process Technology +18
Zirconia thin film deposition on silicon by reactive gas flow sputtering: the influence of low energy particle bombardment
Thomas A. Jung, A. Westphal · Materials Science and Engineering A · 1991 · 26 citations
Materials Science, Materials Engineering, Engineering +8