Etch-induced stress failures of SiO2 cantilever beams

Silicon as a mechanical material

K. Petersen · Proceedings of the IEEE · 1982 · 2.9K citations

Engineering, Materials Engineering, Materials Science +13

Stress Singularities Resulting From Various Boundary Conditions in Angular Corners of Plates in Extension

M. L. Williams · Journal of Applied Mechanics · 1952 · 2.5K citations

Engineering, Geology, Mechanical Behavior Of Materials +16

An integrated mass flow sensor with on-chip CMOS interface circuitry

Eui-Sung Yoon, K.D. Wise · IEEE Transactions on Electron Devices · 1992 · 130 citations

Engineering, Automotive Engineering, Electrical Engineering +17

Integrated thermopile sensors

A.W. van Herwaarden, D.C. van Duyn, B.W. van Oudheusden et al. · Sensors and Actuators A Physical · 1990 · 120 citations

Thermal conductivity and diffusivity of a thin film SiO2Si3N4 sandwich system

F. Völklein · Thin Solid Films · 1990 · 101 citations

Engineering, Materials Engineering, Materials Science +14