Concepedia
Microelectronics Reliability · 1972 · 10 citations · 1 references
Natural SciencesElectrical EngineeringMaterials ScienceElectronic MaterialsMicrofabricationSemiconductor DevicesChemical Vapor DepositionMemristive MaterialsMicrofabrication MaterialsNitride Thin FilmsNitrides Thin FilmsResistive Switching Materials
1
Reactively sputtered titanium resistors, capacitors and rectifiers for microcircuits
Kiyotaka Wasa, Shigeru Hayakawa · Microelectronics Reliability · 1967 · 25 citations
Natural Sciences, Electrical Engineering, Materials Science +12