RSC Advances · 2014 · 39 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsThin FilmsElectrical Properties Of CeramicsFerroelectric CeramicsPiezoelectric CeramicsPiezoelectric MaterialsThin-film MaterialsFerroelectric Thin FilmsMagnetron SputteringPiezoelectric PropertiesPiezoelectric Thin FilmsSeed Layer DepositionThin Film FerroelectricsThin-film Piezoelectric CeramicsThin-film Piezoelectrics
Ba(Zr<sub>0.2</sub>Ti<sub>0.8</sub>)O<sub>3</sub>–0.5(Ba<sub>0.7</sub>Ca<sub>0.3</sub>)TiO<sub>3</sub> (BZT–0.5BCT) thin films were prepared from two ceramics targets, Ba(Zr<sub>0.2</sub>Ti<sub>0.8</sub>)O<sub>3</sub> and (Ba<sub>0.7</sub>Ca<sub>0.3</sub>)TiO<sub>3</sub>, using dual-magnetron sputtering, and a LaNiO<sub>3</sub> (LNO) seed layer was introduced between the film and Pt(111)/Ti/SiO<sub>2</sub>/Si substrates <italic>via</italic> a sol–gel technique.
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