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Tensile-mode fatigue testing of silicon films as structural materials for MEMS

Materials ScienceEngineeringLow-cycle FatigueMicrofabricationMechanical EngineeringSilicon FilmsStressstrain AnalysisMicro-electromechanical SystemDevice ReliabilityMicroelectronicsTensile-mode Fatigue TestingMechanics Of MaterialsPhysic Of FailureStructural Materials