Fabrication of a micro-size diamond tool using a focused ion beam

Abstract

An investigation on the feasibility of sputtering a diamond block into a specially designed three-dimensional cutting tool shape using a focused ion beam (FIB) was carried out. The ion-sputtered removal rate, surface morphology and sputtered feature accuracy were evaluated with respect to the FIB parameters such as ion current and angle of ion incidence through sputtering pockets on the top surface of a diamond substrate. A single crystalline diamond tool, with 25 νm length in the cutting edge and smooth face quality, has been successfully fabricated by using a FIB. These excellent tool characteristics are proven in the results obtained from the machining experiments done on the ultra-precision machine.