Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2006 · 30 citations · 31 references
EngineeringMaterials EngineeringMaterials ScienceMicrofabricationNanomaterialsNanotechnologyCarbon NanotubesElectron Beam LithographyMicrofabrication ProcessesNanoelectronicsNanotubesNanowiresContact ResistanceElectrical Contact ResistanceFocused Ion Beam LithographyMicromanipulationMulti-walled Carbon NanotubesNanofabrication Of Nanoelectronic DevicesNanowire Devices
A comparison of four different methods to make electrical contact to both 100nm gold nanowires and 50nm multiwall carbon nanotubes is given. The techniques are compared in terms of the success yield, contact resistance, complexity of the fabrication steps, and potential for creating novel device structures and architectures. The different methods compared are (i) in situ micromanipulation of wires onto prepatterned electrodes, (ii) ion and electron beam assisted deposition, (iii) electron beam lithography, and (iv) drop casting of wires from solution onto prepatterned electrodes.
31
Helical microtubules of graphitic carbon
Sumio Iijima · Nature · 1991 · 42.8K citations
Crystalline Ropes of Metallic Carbon Nanotubes
Roland Lee, Pavel Nikolaev, Hongjie Dai et al. · Science · 1996 · 5.5K citations
Electrical conductivity of individual carbon nanotubes
Thomas W. Ebbesen, Henri J. Lezec, Hidefumi Hiura et al. · Nature · 1996 · 2.6K citations
Encyclopedia of Nanoscience and Nanotechnology
Chemical & Engineering News · 2013 · 2.6K citations · Full text
Natural Sciences, Materials Engineering, Materials Science +10
Nanotubes as nanoprobes in scanning probe microscopy
Hongjie Dai, Jason H. Hafner, Andrew G. Rinzler et al. · Nature · 1996 · 2.2K citations
Natural Sciences, Materials Engineering, Materials Science +12