Highly metastable amorphous or near-amorphous ternary films (mictamict alloys)

A concept for the design of novel superhard coatings

S. Vepřek, S. Reiprich · Thin Solid Films · 1995 · 959 citations

Engineering, Materials Engineering, Materials Science +12

Improving the properties of titanium nitride by incorporation of silicon

Matthieu Diserens, Jörg Patscheider, F. Lévy · Surface and Coatings Technology · 1998 · 352 citations

Natural Sciences, Materials Engineering, Materials Science +10

Thermodynamic considerations in refractory metal-silicon-oxygen systems

R. Beyers · Journal of Applied Physics · 1984 · 243 citations

Natural Sciences, Materials Engineering, Materials Science +17

Tantalum-based diffusion barriers in Si/Cu VLSI metallizations

E. Kolawa, Jen‐Sue Chen, J.S. Reid et al. · Journal of Applied Physics · 1991 · 222 citations · Full text

Engineering, Materials Engineering, Materials Science +17

Ti-Si-N films prepared by plasma-enhanced chemical vapor deposition

Shizhi Li, Yulong Shi · Plasma Chemistry and Plasma Processing · 1992 · 211 citations

Natural Sciences, Materials Engineering, Materials Science +14