An AlGaAs/GaAs Tunnel Diode Integrated with Nanometer-Scale Atomic Force Microscope Tip-Induced Oxides

Yoshitaka Okada, Yoshimasa Iuchi, Mitsuo Kawabe, James S. Harris, Jr. Jr.

Japanese Journal of Applied Physics · 1999 · 10 citations · 15 references

Concepts

Abstract

We have fabricated and investigated the fundamental electron transport properties of a two-terminal tunnel diode, which consisted of a two-dimensional electron gas channel formed at an AlGaAs/GaAs heterojunction by molecular beam epitaxy and nanometer-scale oxides locally generated by using an atomic force microscope (AFM). The AFM-generated oxides were adopted successfully as integral tunnel barriers for electron transport, and single electron transport and Coulomb blockade regimes were observed in a quantum dot tunnel diode structure.

References

15