Uses of Corona Discharges in the Semiconductor Industry

Abstract

Corona discharges can be useful tools in the semiconductor industry. This paper describes published and previously unpublished applications of corona discharges in device manufacturing, in quality control of insulators, in failure analysis, and in understanding electrical properties of insulators. These uses include deposition of passivating glasses, decoration of defects in insulating thin films, and detection of very thin insulators. Applications of corona discharges in studying the physics of oxides and the kinetics of oxide growth are also reviewed. A description of previously unpublished uses of corona discharges for device evaluation and failure analysis is also presented, with emphasis on high voltage devices.