Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD) - Concepedia

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Effect of the oxygen flow on the properties of ITO thin films deposited by ion beam assisted deposition (IBAD)

DOI Full Paper Access

44

Citations

20

References

2007

Year

Lijian Meng, Jinsong Gao, R.A. Silva, Shigeng Song

Thin Solid Films

Materials ScienceEngineeringSurface ScienceApplied PhysicsOxygen FlowIto Thin FilmsIon BeamThin FilmsPulsed Laser DepositionChemical DepositionChemical Vapor DepositionThin Film Processing

References

	Year	Citations

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