Concepedia

An accurate and computationally efficient semi-empirical model for arsenic implants into single-crystal (100) silicon

Shyh-Horng Yang, Steven J. Morris, David L. Lim, A.F. Tasch, Robert B. Simonton, D. Kamenitsa, C. W. Magee, G. Lux

Journal of Electronic Materials · 1994 · 13 citations · 8 references

DOI

Concepts

References

8

An Algorithm for Least-Squares Estimation of Nonlinear Parameters

Donald W. Marquardt · Journal of the Society for Industrial and Applied Mathematics · 1963 · 30.4K citations

, , +11

A method for the solution of certain non-linear problems in least squares

Kenneth Levenberg · Quarterly of Applied Mathematics · 1944 · 12.2K citations · Full text

, , +4

An Algorithm for Least-Squares Estimation of Nonlinear Parameters

Donald W. Marquardt · SIAM Journal on Applied Mathematics · 1963 · 2.8K citations

, , +11

Secondary Ion Mass Spectrometry

Analytica Chimica Acta · 1993 · 1.1K citations

, , +16

Profile distortions and atomic mixing in SIMS analysis using oxygen primary ions

K. Wittmaack, W. Wach · Nuclear Instruments and Methods in Physics Research · 1981 · 94 citations

, , +10