Concepedia

W. Wach

WW

Statistics

Publications

8

Citations

345

H-Index

8

Active since

1978

Affiliations

Munich Security Conference(Current)

W. Wach is an author at Munich Security Conference specializing in materials science, silicon materials, and ion implantation.

Publications per year

1978–1983

8

Publications

8

Profile distortions and atomic mixing in SIMS analysis using oxygen primary ions

K. Wittmaack, W. Wach · Nuclear Instruments and Methods in Physics Research · 1981 · 94 citations

, , +10

Ion implantation and sputtering in the presence of reactive gases: Bombardment-induced incorporation of oxygen and related phenomena

W. Wach, K. Wittmaack · Journal of Applied Physics · 1981 · 49 citations

, , +14

High fluence retention of noble gases implanted in silicon

K. Wittmaack, Paul S. Blank, W. Wach · Radiation Effects · 1978 · 48 citations

, , +12

Low energy range distributions of 10B and 11B in amorphous and crystalline silicon

W. Wach, K. Wittmaack · Nuclear Instruments and Methods in Physics Research · 1982 · 46 citations

, , +14

Element‐Specific broadening effects in SIMS depth profiling of light impurities implanted in silicon

W. Wach, K. Wittmaack · Surface and Interface Analysis · 1982 · 33 citations

, , +17

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