Growth stresses and viscosity of thermal oxides on silicon and polysilicon

General Relationship for the Thermal Oxidation of Silicon

B. E. Deal, Andrew S. Grove · Journal of Applied Physics · 1965 · 3.4K citations

Natural Sciences, Chemistry, Materials Science +17

Stress-related problems in silicon technology

S. M. Hu · Journal of Applied Physics · 1991 · 499 citations

Engineering, Materials Engineering, Materials Science +17

Two-dimensional thermal oxidation of silicon. II. Modeling stress effects in wet oxides

Dah-Bin Kao, J.P. McVittie, William D. Nix et al. · IEEE Transactions on Electron Devices · 1988 · 381 citations

Natural Sciences, Materials Engineering, Materials Science +17

Oxidation of Metals at High Temperatures

Walter J. Moore · Journal of The Electrochemical Society · 1953 · 378 citations

Natural Sciences, Chemistry, Materials Science +17

Viscous flow of thermal SiO2

E.P. EerNisse · Applied Physics Letters · 1977 · 284 citations

Engineering, Materials Engineering, Materials Science +17