Concepedia

Publication | Closed Access

Fine pattern fabrication on glass surface by imprint lithography

DOI

76

Citations

4

References

2003

Year

Yoshihiko Hirai, K. Kanakugi, Takako Yamaguchi, Kazuyuki Yao, S. Kitagawa, Yoshio Tanaka
Microelectronic Engineering

References

YearCitations

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