Surface and Interface Analysis · 2002 · 22 citations · 28 references
Natural SciencesMaterials EngineeringMaterials ScienceNanomaterialsNanotechnologySurface ScienceMask DesignMask FabricationNanoimprint LithographyNanostructured SurfacesPhysical Vapor DepositionThin-film DepositionFabricationNanostructuresNear-field Optical MicroscopyNear-field OpticsNear-field Scanning Optical MicroscopyScanning Near-field Optical MicroscopySurface UltrastructureThin Film Nanostructuring
Abstract Monolayers of monodisperse latex beads of submicron size are used as a convenient mask for physical vapour deposition to produce latex bead projection patterns as nanostructures that have been used often as test structures for near‐field optical applications. Variations of the fabrication technique lead to derived nanostructures: flat surface structures are formed by embedding projection patterns consisting of one material into the surface of a different material; complementary projection patterns are formed by using a projection pattern as a mask for a nanoimprinting process; and submicron ring structures are formed in a controlled way from the debris of the latex bead mask. The application of such nanostructures as test patterns for scanning near‐field optical microscopy (SNOM) is demonstrated. Copyright © 2002 John Wiley & Sons, Ltd.
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Near-field optical-scanning microscopy
U. Dürig, Dieter Pohl, F. Röhner · Journal of Applied Physics · 1986 · 727 citations
H. W. Deckman, J. H. Dunsmuir · Applied Physics Letters · 1982 · 606 citations
Facts and artifacts in near-field optical microscopy
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