Round robin investigation of silicon oxide on silicon reference materials for ellipsometry
Jan Vanhellemont,
H.E. Maes,
Marc Schaekers,
A. Armigliato,
H. Cerva,
A.G. Cullis,
J. de Sande,
H.W. Dinges,
J. Hallais,
V. Nayar,
Applied Surface Science · 1993 · 15 citations · 2 references