Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching - Concepedia

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Simple nanostructuring on silicon surface by means of focused beam patterning and wet etching

23

Citations

10

References

2000

Year

M. Koh, S. Sawara, Tetsuro Shinada, T. Goto, Yuichiro Ando, Iwao Ohdomari

Applied Surface Science

Materials ScienceEngineeringBeam LithographyMicrofabricationNanotechnologySurface ScienceApplied PhysicsSilicon SurfaceNanostructuringNanolithographyNanofabricationFocused Beam PatterningSilicon On InsulatorMicroelectronicsPlasma EtchingWet EtchingNanolithography Method

References

	Year	Citations

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