Concepedia

Comparative study on early stages of film growth for transparent conductive oxide films deposited by dc magnetron sputtering

Yasushi Sato, Mikihiro Taketomo, Norihiro Ito, Amica Miyamura, Yuzo Shigesato

Thin Solid Films · 2007 · 42 citations · 15 references

DOI

Concepts

References

15

Highly Conductive and Transparent Aluminum Doped Zinc Oxide Thin Films Prepared by RF Magnetron Sputtering

Tadatsugu Minami, Hidehito Nanto, Shinzo Takata · Japanese Journal of Applied Physics · 1984 · 548 citations

, , +17

Electrical and structural properties of low resistivity tin-doped indium oxide films

Yuzo Shigesato, Satoru Takaki, T. Haranoh · Journal of Applied Physics · 1992 · 362 citations

, , +17

Low resistivity indium–tin oxide transparent conductive films. II. Effect of sputtering voltage on electrical property of films

S. Ishibashi, Yoshiyuki Higuchi, Yukihide Ota et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 275 citations

, , +17

Electrical and optical properties of amorphous indium zinc oxide films

Norihiro Ito, Yasushi Sato, Pung Keun Song et al. · Thin Solid Films · 2005 · 269 citations

, , +14

Influence of DC magnetron sputtering parameters on the properties of amorphous indium zinc oxide thin film

Yeon Sik Jung, Ji Yoon Seo, Dong Wook Lee et al. · Thin Solid Films · 2003 · 214 citations

, , +16