Sensors and Actuators A Physical · 2011 · 77 citations · 24 references
Natural SciencesMaterials EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSurface ScienceEtching ProcessesInterface EngineeringSilicon MaterialsSubstrate PreparationSurface PassivationThin Film EtchingEtch MechanismsEtchingSilicon EtchingSubstrate EtchingSurface Etching
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