Schottky barrier height of sputtered TiN contacts on silicon

A modified forward <i>I</i>-<i>V</i> plot for Schottky diodes with high series resistance

H. Norde · Journal of Applied Physics · 1979 · 1.5K citations

Engineering, Electrical Engineering, Materials Science +14

Metal-semiconductor contacts

M. Pepper · Physics in Technology · 1974 · 1.1K citations

Reducing the effective height of a Schottky barrier using low-energy ion implantation

J.M. Shannon · Applied Physics Letters · 1974 · 165 citations

Engineering, Electrical Engineering, Materials Science +17

<i>Metal–Semiconductor Contacts</i>

E. H. Rhoderick, A. Rothwarf · Physics Today · 1979 · 165 citations

TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devices

M. Wittmer · Applied Physics Letters · 1980 · 137 citations

Engineering, Materials Engineering, Materials Science +17