Materials Letters · 2013 · 24 citations · 13 references
Materials ScienceEngineeringNano-porous SiliconMicrofabricationNanotechnologyNanomanufacturingNanofabricationSilicon On InsulatorPlasma EtchingNanolithography Method
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Formation and application of porous silicon
H. Föll, M. Christophersen, Jürgen Carstensen et al. · Materials Science and Engineering R Reports · 2002 · 765 citations
Porosity and Pore Size Distributions of Porous Silicon Layers
R. Hérino, G. Bomchil, K. Barla et al. · Journal of The Electrochemical Society · 1987 · 564 citations