Publication | Closed Access
Fabrication of nano-porous silicon using alkali etching process
24
Citations
13
References
2013
Year
Materials ScienceEngineeringNano-porous SiliconMicrofabricationNanotechnologyNanomanufacturingNanofabricationSilicon On InsulatorPlasma EtchingNanolithography Method
| Year | Citations | |
|---|---|---|
2002 | 765 | |
1987 | 564 | |
2008 | 63 | |
2005 | 56 | |
2007 | 49 | |
1999 | 48 | |
2008 | 38 | |
2004 | 28 | |
2009 | 26 | |
2011 | 18 |
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