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Antireflective porous layer formation on multicrystalline silicon by metal particle enhanced HF etching

Materials ScienceEngineeringMicrofabricationSurface ScienceApplied PhysicsMetal ParticleSemiconductor Device FabricationPlasma EtchingSilicon On InsulatorMicroelectronicsMulticrystalline SiliconNanolithography Method