Applied Physics A · 2005 · 17 citations · 20 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsNanomaterialsCoating TechnologyCoatingsNanocompositesPowder ProcessingThin-film DepositionThin-film MaterialsBiomedical NanocompositesCeramic Thin FilmsFilm DepositionNanocomposite FilmsOrganic-inorganic NanocompositesSputter DepositionThin Film Deposition Materials
20
Metal ion deposition from ionized mangetron sputtering discharge
S. M. Rossnagel, Jeffrey Hopwood · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1994 · 307 citations
Natural Sciences, Materials Engineering, Materials Science +17