Microprocess for fabricating carbon-nanotube probes of a scanning probe microscope

Abstract

We have developed microprocesses to make carbon-nanotube probes for a scanning probe microscope. The processes contain electric-field induced transportation, welding and fixation by electron-beam carbon deposition and are performed in a scanning electron microscope equipped with two individual manipulable stages. Using the nanotube probes produced, a fine structure of helical and twinned deoxyribonucleic acid and an abrupt height transition with high fidelity in a 4.7 GB digital versatile disk are imaged with tapping-mode atomic force microscopy in air.