CrN/AlN nanolaminate coatings deposited via high power pulsed and middle frequency pulsed magnetron sputtering

An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments

W. C. Oliver, George M. Pharr · Journal of materials research/Pratt's guide to venture capital sources · 1992 · 26.1K citations

Elastic Modulus, Improved Technique, Engineering +11

Reactive-sputter-deposited TiN films on glass substrates

Joshua Pelleg, Levy Zevin, S. Lungo et al. · Thin Solid Films · 1991 · 736 citations

Materials Science, Materials Engineering, Engineering +6

High power impulse magnetron sputtering: Current-voltage-time characteristics indicate the onset of sustained self-sputtering

André Anders, Joakim Andersson, Arutiun P. Ehiasarian · Journal of Applied Physics · 2007 · 340 citations · Full text

Materials Engineering, Electrical Engineering, Engineering +12

An introduction to thin film processing using high-power impulse magnetron sputtering

Daniel Lundin, Kostas Sarakinos · Journal of materials research/Pratt's guide to venture capital sources · 2012 · 287 citations · Full text

Engineering, Microfabrication, Applied Physics +5

On the deposition rate in a high power pulsed magnetron sputtering discharge

Jones Alami, Kostas Sarakinos, G. Mark et al. · Applied Physics Letters · 2006 · 163 citations · Full text

Electrical Engineering, Engineering, Physics +11