Determination of the thickness and optical constants of nanofilms produced by the thermal oxidation of InP with V2O5, V2O5 + PbO, and NiO + PbO chemical stimulator layers grown by magnetron sputtering

Abstract

The thickness and optical constants of films grown through the thermal oxidation of V 2 O 5 /InP, (NiO + PbO)/InP, and (V 2 O 5 + PbO)/InP structures produced by magnetron sputtering have been determined by spectral ellipsometry. The results demonstrate that the structures have sharp interfaces and their optical constants in the long-wavelength part of the spectrum are well described by the Cauchy model with a normal dispersion law, which allows one to determine the thickness of such nanofilms with high accuracy using high-speed ellipsometric characterization with a single-wavelength laser ellipsometer.