The deposition of silicon from silane in a low-pressure hot-wall system - Concepedia

Concepedia

Publication | Closed Access

The deposition of silicon from silane in a low-pressure hot-wall system

75

Citations

4

References

1982

Year

W. A. P. Claassen, J. Bloem, W. G. J. N. Valkenburg, C.H.J. Van Den Brekel

Journal of Crystal Growth

EngineeringMicrofabricationSurface ScienceApplied PhysicsSiliceneSemiconductor Device FabricationHeat TransferChemical Vapor DepositionLow-pressure Hot-wall SystemSilicon On InsulatorSilicon Debugging

References

	Year	Citations

Page 1