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Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabrication

Materials ScienceEngineeringNanoimprint LithographyBeam LithographyMicrofabricationFabrication TechniquePattern TransferNanolithographyNanofabricationBiomedical EngineeringGa ImplantationPlasma Etching3D PrintingReactive IonNanolithography Method