Publication | Closed Access
Shadow evaporation method for fabrication of sub 10 nm gaps between metal electrodes
51
Citations
4
References
1999
Year
Materials ScienceElectrical EngineeringEngineeringMetal ElectrodesMicrofabricationSurface ScienceApplied PhysicsVacuum DeviceChemical DepositionShadow Evaporation MethodNm GapsChemical Vapor DepositionNanolithography MethodElectrical Insulation
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