Microelectronic Engineering · 1999 · 51 citations · 4 references
Natural SciencesMaterials EngineeringMaterials ScienceMicrofabricationNanomaterialsThin FilmsDielectricsElectrode MaterialsMask DesignMask FabricationMetal-semiconductor ContactsThin Film LithographyElectrode CoatingsElectrode FabricationElectrode Surface EngineeringShadow Mask Patterning
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An approach to electrical studies of single nanocrystals
David L. Klein, Paul L. McEuen, J. E. B. Katari et al. · Applied Physics Letters · 1996 · 344 citations