Applied Physics A · 1974 · 19 citations · 11 references
Ion ImplantationGold DopingEngineeringNanotechnologyNanoelectronicsApplied PhysicsSemiconductor Device FabricationSilicon On InsulatorMicroelectronics
11
Deep impurities in semiconductors
J. Llacer · Journal of Crystal Growth · 1974 · 785 citations
Mechanism of Diffusion of Copper in Germanium
F. C. Frank, David Turnbull · Physical Review · 1956 · 577 citations
W Murray Bullis · Solid-State Electronics · 1966 · 313 citations
Mechanism of Gold Diffusion into Silicon
William R. Wilcox, T. J. LaChapelle · Journal of Applied Physics · 1964 · 214 citations