The effects of rapid thermal processing on ultra-shallow junctions for deep sub-micron MOSFETs - Concepedia

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The effects of rapid thermal processing on ultra-shallow junctions for deep sub-micron MOSFETs

10

Citations

9

References

1995

Year

R Liu, C.-Y. Lu, J.J. Sung, C. S. Pai, N. S. Tsai

Solid-State Electronics

Electrical EngineeringSemiconductor DeviceEngineeringPhysicsMicrofabricationNanoelectronicsDeep Sub-micron MosfetsBias Temperature InstabilityApplied PhysicsSemiconductor Device FabricationUltra-shallow JunctionsMicroelectronicsRapid Thermal Processing

References

	Year	Citations

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