Universal correction procedure for electron-probe microanalysis. III. Comparison with other recent correction procedures

Abstract

Four recently proposed correction procedures for quantitative electron-probe microanalysis have been evaluated using a fairly comprehensive collection of microanalysis results.The Love-Scott I1 model.which incorporates the new 'quadrilateral' absorption correction.gives the best performance for all specimens included in the data base.The methods proposed by BaStin and by Tanuma are reasonable for heavier element analysis but are less satisfactory when applied to the lighter elements ( 2 < 10).The Love-Scott I model.with its simpler 'square' @(pz) profile. is not recommended for use when absorption effects are large.say 50%.although it can deal satisfactorily with heavy element analyses.