Evaluation of a new correction procedure for quantitative electron probe microanalysis

Abstract

A new correction procedure for converting electron-probe microanalysis measurements into true weight concentration is proposed. It incorporates a new atomic number correction and an absorption correction based upon Bishop's model (1974). Unlike earlier treatments the model does not have to rely upon any empirical optimisation of input parameters. The correction procedure has been tested by applying it to a wide range of microanalysis data including light-element results, and it is shown to give greater accuracy than the established methods.