A versatile atomic number correction for electron-probe microanalysis

Abstract

A new atomic number correction is proposed for quantitative electron-probe microanalysis. Analytical expressions for the stopping power S and back-scatter R factors are derived which take into account atomic number of the target, incident electron energy and overvoltage; the latter expression is established using Monte Carlo calculations. The correct procedures for evaluating S and R for multi-element specimens are described. The new method, which overcomes some limitations inherent in either the Duncumb and Reed (1968) or the Philibert and Tixier (1968) atomic number corrections, may readily be used where specimens are inclined to the electron beam.