On the growth of CoSi2 and CoSi2/Si heterostructures on Si(111)

Growth of single-crystal CoSi2 on Si(111)

R. T. Tung, J. C. Bean, J. M. Gibson et al. · Applied Physics Letters · 1982 · 201 citations

Natural Sciences, Materials Science, Physics +17

Double heteroepitaxy in the Si (111)/CoSi2/Si structure

Shyuichi Saitoh, Hiroshi Ishiwara, Seijiro Furukawa · Applied Physics Letters · 1980 · 173 citations

Engineering, Materials Engineering, Materials Science +16

Silicon/metal silicide heterostructures grown by molecular beam epitaxy

J. C. Bean, J. M. Poate · Applied Physics Letters · 1980 · 167 citations

Engineering, Materials Engineering, Materials Science +17

Cobalt disilicide epitaxial growth on the silicon (111) surface

C. Pirri, J.C. Peruchetti, G. Gewinner et al. · Physical review. B, Condensed matter · 1984 · 120 citations

Natural Sciences, Materials Engineering, Materials Science +17

Formation of Uniform Solid-Phase Epitaxial CoSi₂ Films by Patterning Method

Kouichirou Ishibashi, Seijiro Furukawa · Japanese Journal of Applied Physics · 1985 · 72 citations

Natural Sciences, Materials Science, Physics +15