Thermal actuation, a suitable mechanism for high frequency electromechanical resonators

Abstract

This work presents high-frequency thermally actuated micromechanical resonators and demonstrates potential suitability of thermal actuation for high frequency applications. Thermally actuated single crystal silicon resonators with frequencies up 61 MHz have been successfully fabricated and characterized. It is shown both theoretically and experimentally that as opposed to the general perception, thermal actuation is a more efficient actuation mechanism for higher frequency rather than lower frequency applications. Thermal actuation can become a viable and competitive approach as the electromechanical device dimensions reach the lower micron and nanometer range.