Sensors and Actuators A Physical · 2006 · 39 citations · 13 references
Natural SciencesMaterials EngineeringMaterials ScienceCeramic MaterialsCeramicsElectronic MaterialsCeramic MorphologyCeramic ProcessingSoft LithographyThin-film PatterningCeramic EtchingCeramic Pattern DesignSilicon Carbide (Sic) MaterialsSilicon Carbide CeramicsSoft Lithographic Device Fabrication
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Younan Xia, George M. Whitesides · Annual Review of Materials Science · 1998 · 4.6K citations
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